SPECIALTY CHEMICALS FOR ELECTRONICS
(ALD/CVD/MOCVD PRECURSORS)

EpiValence is highly focussed, dedicated to providing the highest quality products and services on a Global basis to meet customer requirements now and in the future. Strategic alliances and investments have secured EpiValence’s position and ensure it will remain one of the leading specialty chemical suppliers to the electronics market worldwide.

The full range of EpiValence products covers a number of diverse applications and numerous added value services including technical and customer support are available.

A core series of chemicals available are those suited to vapour phase deposition techniques such as MOCVD, ALD and CVD precursors. EpiValence expertise ensures a wide range of chemistries for different elements is covered by our standard offerings as listed below. Custom synthesis is also available to provide compounds not listed.

Product Portfolio for CVD/ALD Processes:

Aluminium
Aluminium trimethyl	Me3Al	75-24-1
Aluminium tert-butoxide	Al(OtBu)3	556-91-2
Aluminium dimethyl isopropoxide	Me2Al(OiPr)	6063-89-4
Aluminium tetramethylheptanedionate	Al(THD)3	14319-08-5
Antimony
Antimony ethoxide	Sb(OEt)3	10433-06-4
Antimony isopropoxide	Sb(OiPr)3	18770-47-3
Barium
Barium tetramethyl heptanedionate	Ba(THD)2	17594-47-7
Bismuth
Bismuth hexafluoracetylacetonate	Bi(hfac)3	141364-06-9 &142617-56-9
Bismuth tetramethyl heptanedionate	Bi(THD)3	142617-53-6
Cadmium
Cadmium dimethyl	Me2Cd	506-82-1
Calcium
Calcium tetramethylheptanedionate	Ca(THD)2	118448-18-3
Cerium(IV)
Cerium isopropoxide isopropanol	Ce(OiPe)4.iPrOH	63007-83-0
Cerium tetramethylheptanedionate	Ce(THD)4	18960-54-8
Cobalt(II)
Cobalt tetramethylheptanedionate	Co(THD)2	13986-53-3
Copper(I)
Copper hexafluoroacetylacetonate cyclooctadiene	Cu(hfac).COD	86233-74-1
Copper(II)
Copper tetramethylheptanedionate	Cu(THD)2	14040-05-2
Erbium
Erbium tetramethylheptanedionate	Er(THD)3	35733-23-4
Europium
Europium tetramethylheptanedionate	Eu(THD)3	15522-71-1
Gadolinium
Gadolinium tetramethylheptanedionate	Gd(THD)3	14768-15-1
Gallium
Gallium tetramethylheptanedionate	Ga(THD)3	34228-15-4
Gallium trimethyl	Me3Ga	1445-79-0
Germanium
Germanium ethoxide	Ge(OEt)4	13165-55-0
Germanium isopropoxide	Ge(OiPr)4	21154-48-3
Germanium methoxide	Ge(OMe)4	992-91-6
Hafnium
Hafnium tert-butoxide	Hf(OtBu)4	2172-02-3
Hafnium ethoxide	Hf(OEt)4	13428-80-3
Hafnium isopropoxide isopropanol	Hf(OiPr)4.iPrOH	59301-57-4
Hafnium dimethylamide	Hf(NMe2)4	19782-68-4
Hafnium chloride	HfCl4	13499-05-3
Hafnium tetramethylheptanedionate	Hf(THD)4	63370-90-1
Indium
Indium acetylacetonate	In(acac)3	14405-45-9
Indium isopropoxide	In5O(OiPr)13	118240-53-2
Indium Trimethyl	Me3In	3385-78-2
Iridium
Iridium acetylacetonate	Ir(acac)3	15635-87-7
Iron(III)
Iron tetramethylheptanedionate	Fe(THD)3	14876-47-2
Lanthanum
Lanthanum tetramethylheptanedionate	La(THD)3	14319-13-2
Lithium
Lithium tert-butoxide	LiOtBu	21361-33-1
Lithium tetramethylheptanedionate	LiTHD	22441-13-0
Magnesium
Magnesium tetramethylheptanedionate	Mg(THD)2	21361-35-3
Molybdenum(VI)
Molybdenum oxo acetylacetonate	MoO2(acac)	17524-05-9
Molybdenum oxo tetramethylheptanedionate	MoO2(THD)2	34872-98-5
Nickel
Nickel tetramethylheptanedionate	Ni(THD)2	14481-08-4
Niobium
Niobium n-butoxide	Nb(OBu)5	51030-47-8
Niobium ethoxide	Nb(OEt)5	3236-82-6
Niobium isopropoxide	Nb(OiPr)5	18368-80-4
Palladium
Palladium hexafluoroacetylacetonate	Pd(hfac)2	64916-48-9
Palladium tetramethylheptanedionate	Pd(THD)2	15214-66-1
Platinum
Platinum (trimethyl)methylcyclopentadienyl	MeCpPtMe3	94442-22-5
Potassium
Potassium tetramethylheptanedionate	KTHD	22441-14-1
Scandium
Scandium isopropoxide	Sc5O(OiPr)13	60406-93-1
Scandium tetramethylheptanedionate	Sc(THD)3
Silicon
Bis(Diethylamino) silane	(Et2N)2SiH2	27804-64-4
Bis(t-Butylamino) silane	(tBu2N)2SiH2	186598-40-3
Hexachloro disilane	Cl3SiSiCl3	13465-77-5
Silver
Silver hexafluoroacetylacetonate cyclooctadiene	Ag(hfac).COD	38892-25-0
Silver pivalate	Ag(piv)	7324-58-5
Sodium
Sodium tetramethylheptanedionate	Na(THD)	22466-43-9
Strontium
Strontium isopropoxide	Sr(OiPr)2	88863-33-6
Strontium tetramethylheptanedionate	Sr(THD)2	36830-74-7
Tantalum
Tantalum ethoxide	Ta(OEt)5	6074-84-6
Tantalum chloride	TaCl5	7721-01-9
Tantalum methoxide	Ta(OMe)5	865-35-0
Tantalum dimethlyamide	Ta(NMe2)5	19824-59-0
Tantalum tert-butylimido trisdiethylamide	Ta(=NtBu)(NEt2)3	169896-41-7
Tantalum tetraethoxy dimethylaminoethoxide	Ta(OEt)4dmae	172901-22-3
Tellurium
Tellurium ethoxide	Te(OEt)2	2017-01-8
Tellurium diisopropyl	Te(iPr)2	51112-72-2
Tellurium isopropoxide	Te(OiPr)2	1795-64-8
Thulium
Thulium tetramethylheptanedionate	Tm(THD)3	15631-58-0
Tin(II)
Tin acetate	Sn(OAc)2	638-39-1
Tin acetylacetonate	Sn(acac)2	56508-29-3
Tin ethoxide	Sn(OEt)2	14791-99-2
Tin hexafluoroacetylacetonate	Sn(hfac)2	51319-99-4
Tin tetramethylheptanedionate	Sn(THD)2	42847-52-9
Tin(IV)
Tin tert-butoxide	Sn(OtBu)4	36809-75-3
Tin dimethylamide	Sn(NMe2)4	1066-77-9
Tin isopropoxide	Sn(OiPr)4	1184-61-8
Titanium
Titanium tert-butoxide	Ti(OtBu)4	3087-39-6
Titanium diethylamide	Ti(NEt2)4	4419-47-0
Titanium dimethylamide	Ti(NMe2)4	3275-24-9
Titanium ethoxide	Ti(OEt)4	3087-36-3
Titanium chloride	TiCl4	7550-45-0
Titanium isopropoxide	Ti(OiPr)4	546-68-9 & 13421-84-6
Tungsten(V)
Tungsten ethoxide dimethoxyethane	W(OEt)5.dme	26143-11-3
Tungsten(VI)
Tungsten ethoxide	W(OEt)6	62571-53-3
Tungsten isopropoxide	W(OiPr)6	866594-56-1& 52321-90-1
Vanadium
Vanadium oxo isopropoxide	VO(OiPr)3	5588-84-1
Ytterbium
Ytterbium isopropoxide	Yb(OiPr)3	6742-69-4
Ytterbium tetramethylheptanedionate	Yb(THD)3	15492-52-1
Yttrium
Yttrium isopropoxide	Y(OiPr)3	118458-20-1
Yttrium tetramethylheptanedionate	Y(THD)3	15632-39-0
Zinc
Zinc diethyl	Et2Zn	557-20-0
Zinc dimethyl triethylamine	Me2Zn.NEt3	88029-05-4
Zinc methyl isopropoxide	MeZn(OiPr)	10217-79-5
Zinc tetramethylheptanedionate	Zn(THD)2	14363-14-05
Zirconium
Zirconium tert-butoxide	Zr(OtBu)4	2081-12-1
Zirconium ethoxide	Zr(OEt)4	18267-08-8
Zirconium chloride	ZrCl4	10026-11-6
Zirconium diethylamide	Zr(NEt2)4	13801-49-5
Zirconium isopropoxide mono-isopropanol	Zr(OiPr)4.iPrOH	14717-56-7 & 50939-84-9
Zirconium tetramethylheptanedionate	Zr(THD)4	18865-74-2
Zirconium tri-isopropoxy tetramethylheptanedionate	Zr(OiPr)3THD	213177-21-0